Compositional characterization of nickel silicides by HAADF-STEM imaging

Author: Verleysen E.   Bender H.   Richard O.   Schryvers D.   Vandervorst W.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.46, Iss.7, 2011-04, pp. : 2001-2008

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Abstract