Tunable surface hardness and dielectric constant of SiC_xO_y thin film converted from solution-processed organosilicon compound

Author： Lee Pyoung-Chan Kim Sieun Hwang Taeseon Oh Joon-Suk Oh Yong-Soo Pu Lyongsun Kim Byung-Woo Lee Youngkwan Choi Hyouk Jeoung Sun Nam Jae-Do

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.47, Iss.11, 2012-06, pp. : 4540-4545

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