Influences of film composition and annealing on the mechanical and electrical properties of W–Mo thin films

Author: Namazu Takahiro   Maruo Naoto   Inoue Shozo  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.47, Iss.6, 2012-03, pp. : 2725-2730

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