Diffusion Processes in Semiconductor Structures During Microwave Annealing: Proceedings of the Workshop on the Physics of Microwaves

Author: Bykov Yu. V.   Eremeev A. G.   Zharova N. A.   Plotnikov I. V.   Rybakov K. I.   Drozdov M. N.   Drozdov Yu. N.   Skupov V. D.  

Publisher: Springer Publishing Company

ISSN: 0033-8443

Source: Radiophysics and Quantum Electronics, Vol.46, Iss.8-9, 2003-08, pp. : 749-755

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