Fabricating Microbolometer Array on Unplanar Readout Integrated Circuit

Author: Wang Hongchen   Yi Xinjian   Lai Jianjun   Li Yi  

Publisher: Springer Publishing Company

ISSN: 0195-9271

Source: International Journal of Infrared and Millimeter Waves, Vol.26, Iss.5, 2005-05, pp. : 751-762

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Abstract