Thermal Conductivity Measurement of Thermally-Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique

Author： Kato R.   Hatta I.  

Publisher： Springer Publishing Company

ISSN： 0195-928X

Source： International Journal of Thermophysics, Vol.26, Iss.1, 2005-01, pp. : 179-190

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