Characterization of interconnect interfacial adhesion by cross-sectional nanoindentation

Author： Scherban T.   Pantuso D.   Sun B.   El-Mansy S.   Xu J.   Elizalde M.R.   Sánchez J.M.   Martínez-Esnaola J.M.  

Publisher： Springer Publishing Company

ISSN： 0376-9429

Source： International Journal of Fracture, Vol.119, Iss.4, 2003-01, pp. : 421-429

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