Cross-sectional nanoindentation for copper adhesion characterization in blanket and patterned interconnect structures: experiments and three-dimensional FEM modeling

Author： Roy Sébastien   Darque-Ceretti Evelyne   Felder Eric   Monchoix Hervé  

Publisher： Springer Publishing Company

ISSN： 0376-9429

Source： International Journal of Fracture, Vol.144, Iss.1, 2007-03, pp. : 21-33

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