Design of elastic components of nano- and microelectromechanical systems

Author： Belozubov E.   Vasiliev V.   Zapevalin A.   Chernov P.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.54, Iss.1, 2011-04, pp. : 21-24

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