Electronic transport properties of microcrystalline silicon thin films prepared by VHF-PECVD

Author： Okur S.   Güneş M.   Göktaş O.   Finger F.   Carius R.  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.15, Iss.3, 2004-03, pp. : 187-191

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