Effect of ramping-up rate on film thickness for spin-on processing

Author: Birnie Dunbar   Hau Steven   Kamber Derrick   Kaz David  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.16, Iss.11-12, 2005-11, pp. : 715-720

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Abstract