Plasma parameters and volume kinetics in Cl2/O2 mixtures

Author： Efremov A.   Kwon K.-H.   Park C.-S.   Choi S.-I.   Kim C.   Chai S.-H.  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.16, Iss.6, 2005-06, pp. : 315-321

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