Growth and characterization of HfO2 high-k gate dielectric films by laser molecular beam epitaxy (LMBE)

Author: Lu Y.   Chen X.   Zhu W.   Gopalkrishnan R.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.17, Iss.9, 2006-09, pp. : 685-688

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