Wet etching of sputtered tantalum thin films in NaOH and KOH based solutions

Author： Sood S.   Peelamedu R.   Sundaram K.   Dein E.   Todi R.  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.18, Iss.5, 2007-05, pp. : 535-539

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