Reactive nanolayers for physiologically compatible microsystem packaging

Author: Qiu Xiaotun   Welch David   Christen Jennifer   Zhu Jie   Oiler Jon   Yu Cunjiang   Wang Ziyu   Yu Hongyu  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.21, Iss.6, 2010-06, pp. : 562-566

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Abstract