Oxidation of sputtered Zr thin film on Si substrate

Author: Kurniawan Tedi   Cheong Kuan   Razak Khairunisak   Lockman Zainovia   Ahmad Nuruddin  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.22, Iss.2, 2011-02, pp. : 143-150

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract