Understanding and Modeling the Resistance of High Aspect Ratio FIB-Fabricated Tungsten Vias

Author: Niles David   Dauksher Walter   Kee Ronald  

Publisher: Springer Publishing Company

ISSN: 1059-9495

Source: Journal of Materials Engineering and Performance, Vol.19, Iss.6, 2010-08, pp. : 900-905

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract