Assessment of Techniques for Characterizing the Surface Quality of Ground Silicon Nitride

Author： Zanoria E.S.   Watkins T.R.   Breder K.   Riester L.   Bashkansky M.   Reintjes J.   Sun J.G.   Ellingson W.A.   Blau P.J.  

Publisher： Springer Publishing Company

ISSN： 1059-9495

Source： Journal of Materials Engineering and Performance, Vol.7, Iss.4, 1998-08, pp. : 533-547

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