Plasma Enhanced Chemical Vapor Deposition of Fluorinated Amorphous Carbon Thin Films from Tetrafluoroethylene and Tetraisocyanatesilane

Author: Shirafuji Tatsuru   Nakagami Yuko   Hayashi Yasuaki   Nishino Shigehiro  

Publisher: Springer Publishing Company

ISSN: 1084-0184

Source: Plasmas and Polymers, Vol.3, Iss.2, 1998-06, pp. : 115-127

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