Filtration of Sub-100 nm Particles Using a Bulk-Micromachined, Direct-Bonded Silicon Filter

Author： Tu Jay   Huen Tony   Szema Robert   Ferrari Mauro  

Publisher： Springer Publishing Company

ISSN： 1387-2176

Source： Biomedical Microdevices, Vol.1, Iss.2, 1999-06, pp. : 113-119

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