Rapid Biocompatible Micro Device Fabrication by Micro Electro-Discharge Machining

ISSN： 1387-2176

Source： Biomedical Microdevices, Vol.6, Iss.1, 2004-03, pp. : 41-45

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Abstract

Fabrication of a biocompatible micro device is predominantly done by silicon micromachining techniques. The litho-graphic and etching techniques require preparation and the use of masks which are time consuming and costly. Since bio research involves highly complex mechanisms, the modeling and simulation is difficult and experimental study is inevitable. To incorporate frequent design changes and to realize the hardware quickly, fabrication processes, complementary to the silicon micromachining techniques are required. In the present work the feasibility of using micro electro-discharge machining (EDM) for the fabrication of biocompatible microdevice has been studied. Micro channels with feature size as small as 25 μm are realized. The process is further improved by the introduction of ultrasonic vibration of the workpiece and the total time taken for the hardware realization is about 4 hours. The effects of ultrasonic vibration on the roughness of the spark eroded surface has been studied and reported. The potential of using micro EDM for making biocompatible devices for bio experiments is demonstrated and the surface finish achieved is well within the recommended R_{_z} and R_{_a} values of 3.4 and 0.4 μm respectively for biological studies like implant abutment.