Micro-thermal analysis of thermal conductance distribution in advanced silicon nitrides

Author: Ye J.   Kojima N.   Furuya K.   Munakata F.   Okada A.  

Publisher: Springer Publishing Company

ISSN: 1388-6150

Source: Journal of Thermal Analysis and Calorimetry, Vol.69, Iss.3, 2002-09, pp. : 1031-1036

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Abstract