Modeling multilayered MEMS-based micro-fluidic systems

Author: Bhansali Shekhar   Benjamin Helen   Upadhyay Vandana   Henderson H.   Ahn Chong   Okulan Nihat   Oh Kwang  

Publisher: Springer Publishing Company

ISSN: 1543-1851

Source: JOM, Vol.56, Iss.3, 2004-03, pp. : 57-61

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Abstract