Simulation and Experimental Analysis of Refractory Metal and Aluminum Deposition Over High Aspect Ratio VLSI Topography

Author: Smy T.   Dew S. K.   Brett M. J.  

Publisher: Maney Publishing

ISSN: 0008-4433

Source: Canadian Metallurgical Quarterly, Vol.34, Iss.3, 1995-07, pp. : 195-202

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Abstract