Resonant Frequency Tuning of Piezoelectric Ultrasonic Microsensors by Bias Voltage Application to Extra Top-Electrodes on PZT Diaphragms

Author： Yamashita Kaoru Tomiyama Kenji Yoshikawa Keita Noda Minoru Okuyama Masanori

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.408, Iss.1, 2010-01, pp. : 48-54

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