Analysis of Stress Distribution in Piezoelectric MEMS Energy Harvester Using Shaped Cantilever Structure

Author： Park Jung-Hyun   Kang Junsuk   Ahn Hosang   Kim Seon-Bae   Liu Dan   Kim Dong-Joo  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.409, Iss.1, 2010-01, pp. : 55-61

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