Author： Ozer Zafer Mamedov Amirullah M. Ozbay Ekmel
Publisher： Taylor & Francis Ltd
ISSN： 0015-0193
Source： Ferroelectrics, Vol.446, Iss.1, 2013-01, pp. : 46-58
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Abstract
This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed.
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