EFFECT OF HIGH TEMPERATURE-PRESSURE ON BURIED SILICON DIOXIDE IN SIMOX AND SOI STRUCTURES

Author: MISIUK A.   BAK-MISIUK J.   SURMA B.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.158, Iss.1-6, 2003-01, pp. : 407-410

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Abstract