Mixing of Au in Si induced by secondary and high-order recoil implantation

Author: Khalfaoui R.   Benazzouz C.   Guittoum A.   Tobbeche S.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.160, Iss.9, 2005-09, pp. : 377-382

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Abstract