Laser induced microstructuring of silicon under different atmospheres

Author： Jimenez-Jarquin J. Haro-Poniatowski E. Fernandez-Guasti M. Hernandez-Pozos J. L.

ISSN： 1042-0150

Source： Radiation Effects and Defects in Solids, Vol.164, Iss.7-8, 2009-07, pp. : 443-451

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