EVALUATION OF DIFFERENT METALORGANIC PRECURSORS FOR Ge-Sb-Te THIN FILM DEPOSITION

Author: RESO DENIS   SILINSKAS MINDAUGAS   LISKER MARCO   KALKOFEN BODO   BURTE EDMUND  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.110, Iss.1, 2009-01, pp. : 87-93

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