Properties of DLC Film Deposited on Mould with Micro-Cavity Used in Microforming

Author： Wang Chunju   Guo Bin   Shan Debin   Zhang Hua  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.136, Iss.1, 2012-01, pp. : 35-42

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