TCR Sign Variation of Surface Micromachined Polysilicon Resistor under Joule Self-Heating

Author: Ma Hongyu   Wang Lei   Song Jing   Zhang Weidong   Ding Enjie  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.136, Iss.1, 2012-01, pp. : 99-105

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Abstract