Thermal Stress Induced Thin Film Transfer from Single-crystal Silicon Layer on Sapphire Substrate

Author: Lo F. S.   Hsu R. Y.   Ho C. -C.   Li C.   Lee T. -H.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.144, Iss.1, 2013-01, pp. : 73-78

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