Preparation of SrBi2Ta2O9 Thin Films by Liquid-Delivery MOCVD Without Additional Solvents

Author: Nukaga Norimasa   Ono Hirofumi   Shida Takuya   Machida Hideaki   Suzuki Toshie   Funakubo Hiroshi  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.45, Iss.1, 2002-01, pp. : 215-222

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Abstract