Preparation of PLZT Ferroelectric Films by RF Sputtering on 200 mmϕ Substrate

Author： Kikuchi S.   Miyaguchi Y.   Jimbo T.   Kimura I.   Tanimura M.   Suu K.   Ishikawa M.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.46, Iss.1, 2002-01, pp. : 105-114

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