Characteristics of BST Thin Film Prepared by Novel Chemical Solution Deposition Method for High-Density DRAM Application

Author: Xie Yu-Han   Lin Yin-Yin   Tang Ting-Ao  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.47, Iss.1, 2002-01, pp. : 113-124

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