NiCr Bottom Electrodes for Ta2O5 High Dielectric Thin Films in Metal-Insulator-Metal Capacitors

Author: Lee Eung-Min   Yoon Soon-Gil  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.47, Iss.1, 2002-01, pp. : 41-48

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Abstract