Evaluation of Residual Stress in Thin Ferroelectric Films Using Grazing Incident X-Ray Diffraction

Author: PETROV Peter   SARMA KUMARAVINOTHAN   ALFORD NEIL  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.63, Iss.1, 2004-01, pp. : 183-189

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Abstract