PZT Capacitors on Top of CrTiN/TiN Double Barrier Layers

Author: LEE JINWOO   OH TAEKWAN   HONG SUK-KYOUNG   KIM JIYOUNG  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.64, Iss.1, 2004-01, pp. : 289-295

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