WELL-BEHAVED METAL-OXIDE-SEMICONDUCTOR CAPACITOR CHARACTERISTICS OF ZIRCONIUM OXIDE FILMS FABRICATED BY SURFACE SOL-GEL PROCESS

Author: SHAO QI-YUE   LI AI-DONG   CHENG JIN-BO   XIA YI-DONG   WU DI   LIU ZHI-GUO   MING NAI-BEN  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.74, Iss.1, 2005-09, pp. : 3-11

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