ELECTRICAL PROPERTIES OF Pt/BLT/HfSiON/Si STRUCTURE FOR 1T-TYPE FERROELECTRIC MEMORY

Author: HOKO HIROMASA   AOKI CHIEKO   TABUCHI YOSHIAKI   TAMURA TETSURO   MARUYAMA KENJI   ARIMOTO YOSHIHIRO   ISHIWARA HIROSHI  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.79, Iss.1, 2006-11, pp. : 105-111

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Abstract