MULTI-TARGET REACTIVE SPUTTER DEPOSITION OF LEAD-ENRICHED Pb(Zr,Ti)O 3 THIN FILMS

Author： SUCHANECK G.   LIN WEN-MEI   GERLACH G.   DEYNEKA A.   JASTRABIK L.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.80, Iss.1, 2006-11, pp. : 189-195

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