DESIGN OF A NOVEL PIEZOELECTRIC ACOUSTIC SENSOR USING SURFACE MICROMACHINING

Author： YANG YI   REN TIAN-LING   LIU LI-TIAN  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.80, Iss.1, 2006-11, pp. : 363-372

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

RF-MEMS BAW Filter Using Surface Micromachining

By Cong Peng   Ren Tian-Ling   Liu Jian-She   Liu Li-Tian  

Integrated Ferroelectrics, Vol. 50, Iss. 1, 2002-01 ,pp. : 71-79

Taylor & Francis Ltd

Access to resources Recommend Favorite

ACTIVE DAMPING OF A PIEZOELECTRIC MEMS ACOUSTIC SENSOR

By WU XIAOMING   REN TIANLING   LIU LITIAN  

Integrated Ferroelectrics, Vol. 80, Iss. 1, 2006-11 ,pp. : 317-329

Taylor & Francis Ltd

Access to resources Recommend Favorite

MICROMACHINED PIEZOELECTRIC POLYMER MEMBRANE ACOUSTIC SENSOR

By LAM T.   LAM K.   CHAN H.  

Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 31-37

Taylor & Francis Ltd

Access to resources Recommend Favorite

A Novel High Frequency Surface Acoustic Wave Device Based on Piezoelectric Interdigital Transducers

By SARIN KUMAR A.   PARUCH P.   MARRÉ D.   PELLEGRINO L.   TYBELL T.   BALLANDRAS S.   TRISCONE J.  

Integrated Ferroelectrics, Vol. 63, Iss. 1, 2004-01 ,pp. : 55-62

Taylor & Francis Ltd

Access to resources Recommend Favorite

Design and microfabrication of a hybrid piezoelectric-capacitive tactile sensor

By Dargahi Javad   Rao Nakka Purushotham   Sokhanvar Saeed  

Sensor Review, Vol. 26, Iss. 3, 2006-07 ,pp. : 186-192

Emerald Group Publishing Ltd

Access to resources Recommend Favorite