EFFECT OF SILICON CARBIDE PASSIVATION FILM ON THE RESONANCE CHARACTERISTICS OF CANTILEVER

Author: Choi Ki Yong   Yoon Dae Sung   Kim Tae Song   Choi Duck Kyun  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.88, Iss.1, 2007-02, pp. : 76-84

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Abstract