PYROELECTRIC LiTaO3 THIN FILMS ELABORATED BY RF MAGNETRON SPUTTERING WITH LI ENRICHED TARGET

Author: Nougaret L.   Combette P.   Pascal-Delannoy F.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.95, Iss.1, 2007-12, pp. : 44-53

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Abstract