MICROMACHINED PIEZOELECTRIC MICROSPEAKERS FABRICATED WITH HIGH QUALITY ALN THIN FILM

Author： Seo Kyongwon   Park Jongseon   Kim Hyongjung   Kim Dongki   Ur Soonchul   Yi Seunghwan  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.95, Iss.1, 2007-12, pp. : 74-82

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