FORMAL VALIDATION AND VERIFICATION OF ATOMIC RESOLUTION MICROSCOPE CONTROL AND TOPOGRAPHY

Author： Nicolás Joaquín   Toval Ambrosio   Arenas Aurelio   Alcalde Juan  

Publisher： Taylor & Francis Ltd

ISSN： 1087-6553

Source： Cybernetics and Systems, Vol.32, Iss.8, 2001-12, pp. : 851-870

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