Quantum chemical calculations on Al-CVD using DMEAA: surface reaction mechanism of AlH3 on Al (111)

Author: Nakajima Tohru   Nakatomi Masashi   Yamashita Koichi  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3028

Source: Molecular Physics, Vol.101, Iss.1-2, 2003-01, pp. : 267-276

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Abstract