Scanning methods for production of blazed relief gratings

Author: Ryzi Z.   Fiala P.  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3044

Source: Journal of Modern Optics, Vol.45, Iss.12, 1998-12, pp. : 2443-2449

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Abstract

New methods for the production of blazed relief grating profiles using grating masks with either binary or harmonic transmittance have been developed. These methods are based on the recording of a scanning wave, properly modulated by a mask, through a grating period into photoresist. The applicability of the gratings produced by this method would be especially in the infrared or near-infrared wavelength regions in the reflection mode. These methods have been theoretically analysed and the principal ideas of the methods were experimentally verified.